Six-degree-of-freedom sensor
专利摘要:
A transducer having six degrees of freedom is provided for converting forces and moments applied to a movable member, particularly to the movable arm of a robot, into electrical signals. The transducer includes a cylindrical body which is intended to be connected to the movable member and whose lateral surface has two axially spaced portions each provided with four equiangularly spaced metal plates. A cylindrical casing is resiliently supported about the body and provided on its inner surface with two substantially semi-cylindrical metal plates arranged facing the plates carried by the body in such a way as to define therewith a narrow interspace and to constitute eight capacitors. The capacitances of these capacitors depend on the relative positions of the plates of the casing and the plates of the body. The transducer also includes detectors connected to the plates of the body and of the casing. The detectors are arranged to measure the capacitance of each of the capacitors and to provide, on the basis of this measurement, electrical signals indicative of the forces and the moments applied to the movable member. 公开号:SU1082337A3 申请号:SU813257579 申请日:1981-03-06 公开日:1984-03-23 发明作者:Вентурелло Джорджо;Сальваторе Освальдо 申请人:Чентро Ричерке Фиат С.П.А. (Фирма); IPC主号:
专利说明:
1 The invention relates to load-measuring equipment, in particular, to a sensor with six degrees of freedom intended to convert the forces and moments applied to the moving part, namely to the mobile, arm of the robot, into electrical signals. Sensors with six degrees of freedom are known, containing interconnected modules, each of which is a bar with a thin web. The block construction principle allows sensors to be assembled from modules for force measurement with the desired number of degrees of freedom lj. However, these sensors have insufficient reliability due to their complexity. The closest to the invention in technical essence and the achieved result is a device for measuring forces and moments transmitted by grippers of a manipulator, containing photoelectric sensitive sensors providing measurement of forces and moments in six degrees of freedom 2J. However, the known device due to the complexity of the design and high sensitivity to changes in environmental conditions has a low reliability. The aim of the invention is to increase reliability. This goal is achieved by the fact that in a sensor with six degrees of freedom for converting forces and moments into electrical signals applied to a moving element containing a body j with a driving element, displacement transducers into electrical signals and a recording unit, transducers into an electrical signal are placed in rigid cylindrical housing and are made in the form of eight capacitors, the fixed plates of which are made in the form of two metal semi-cylindrical plates arranged under the same mi corners and fixed inside the casing, and the movable plates are made in the form of two groups separated by one diameter at equal distances from one another along a common axis along the four in each group of metal 1 of figure 1 shows the sensor, perspective view 5 in figure 2 - the same longitudinal section; in FIG. 3 —the cylindrical sensor housing is a perspective view of FIG. 4 — section AA in FIG. 2; on fig.Z - section bb in figure 2; Fig. 6 is a section B-B in Fig. 2 in Fig. 7, is a section of D-D in Fig. 5; Fig. 8 is an electrical circuit of the sensor. The sensor 1 has six degrees of freedom and is connected to one end of the moving part 2, representing, for example, the robot's moving arm. The sensor comprises a rigid cylindrical body 3 located inside a rigid case A having a cylindrical inner surface. The case 3 contains a hollow cylindrical element 5, the inner surface of which is cut at the end facing the arm 2 of the robot 7 of the plastic plates diametrically opposed to pairs and mounted on a cylindrical case rigidly connected to the force-conducting element and located inside the case mounted on the case using elastic pads made in the form of toroidal rings made of elastomer material placed in annular grooves located on the front and side surfaces of the housing, on the torus The hull ax has at least one radial protrusion placed in the groove of the casing with the possibility of limiting the angular movements of the casing relative to the casing, and on the ends of the casing there are annular restrictive gaskets facing the corresponding end surface of the casing and interacting with elastic gaskets with the possibility of limiting the axial displacements of the casing relative to the housing, and the registration unit is designed as a controlled generator, to which eight voltage converters are connected to a stack, each of which is connected to a respective capacitor, and a means of processing signals from voltage converters. In addition, the end face of the casing, opposite the force-driver element, is provided with means for connecting with the working tool. The lower part of the side surface of the cylindrical connecting element 6, intended to connect the body 3 to the end of the robot arm 2, is threaded and engages with the corresponding threaded part of the hollow cylindrical element 5. The connecting element 6 for connecting the housing 3 to the end of the robot arm 2 has a cylindrical shape and the lower part of its side surface has a thread and engages with a corresponding threaded part of the hollow cylindrical element 5. The connecting element 6 is provided with an annular flange 6a, which serves as an end stop for the upper edge of the hollow cylindrical element 5. The annular element 7 is fixed at the end of the movable arm 2 by means of bolts 8 and provided with an axial cylindrical chamber containing first and second coaxial cylindrical parts 9a and 9b through which the connecting element 6 passes. The front part 6b of element 6 partially has a thread for coupling with a nut 10, which serves to connect element 6 to ring element 7. The connecting element 6 is provided with an axial hole 6c and a pair located opposite each other, radial holes 6 d which serve as seats for two transverse fingers 11, the ends of which protrude in a radial direction outward from holes 6d. The lateral surface of the hollow cylindrical element 5 comprises first and second axial parts, each of which is provided with four metal plates 12 arranged at equal angles, being diametrically opposedly mixed and in pairs (FIG. 3 and 4). A finger 13 is provided between two adjacent metal plates 12 and is held by a hollow cylindrical element 5 to facilitate the installation of metal plates 12 on the side surface of the hollow cylindrical element 5 during assembly. The fingers 13 may be metal, in which case their side surfaces are covered with a thin layer. an electrically insulating material obtained, for example, by oxidation. The surface of the hollow cylindrical body 5 is provided with three annular grooves 14, in which the corresponding toroidal rings 15 of an elastomeric material are located, which interact with the inner surface of the casing 4 and serve as elastic spacer elements. The hollow cylindrical element 5 also has an annular groove 16 in the lower end surface in which the toroidal ring 17 of the elastomeric material is placed. The surface of the annular flange 6a of the connecting element 6 is also provided with an annular groove 18 in which a toroidal ring 19 of elastomeric material is placed. The wall of the hollow cylindrical element 5 is provided in accordance with each of the metal plates 12 with a hole 20 through which a corresponding electrical conductor 21 passes, one end of which is soldered to a corresponding metal plate 12. The conductors 21 pass through the holes 6c of the connecting element 6 and the hole 2a at the end of the movable lever 2. The hollow cylindrical body 5 has a cylindrical end protrusion 5a provided with a diametrical hole 5b in which the pin 22 is located, the ends of which protrude into ialnom outward from the protrusion 5a. The hollow cylindrical element 5 can be made of an electrically insulating material having significant mechanical strength. The casing 4 contains a cylindrical sleeve 23, to the ends of which are connected with the help of bolts 24 and 25 corresponding closing elements 26 and 27 (figure 2). The closing element 26 has a circular cylindrical hole 28 (FIG. 3) through which the connecting element 6 passes. On the sides of the opening 28 there are two diametrically opposite grooves 28 about which the ends of the fingers 11 mounted on the connecting element 6 protrude. An annular restrictive gasket 29 is located around the connecting element 6 above the flange by. The bottom surface of the gasket 2 interacts with the toroidal ring 19, serving as an elastic spacer element. An annular restrictive gasket 30 is located around the lower lip of the hollow cylindrical body 5 and rests on the closing element 27. The upper surface of the gasket 30 communicates with the toroidal ring 17 located at the lower end of the hollow cylindrical body 5 and serves as an elastic spacer element. The lower closing member 27 is provided with an axial cylindrical chamber 31 (Fig. 6) consisting of two parts. The cylindrical protrusion 50 of the fallen cylindrical element 5 extends into the first part of the chamber 31. The wall of this first part of the chamber 31 is made with two diametrically opposite grooves 3101, into which the ends of the finger 22 mounted on the lower end of the hollow cylindrical body 5 protrude. The second cylindrical part 31b (FIG. .2) and the side surface of the closing element 27 is threaded. The inner surface of the sleeve 23 is provided with two semi-cylindrical metal plates 32 arranged at equal angles with respect to each other and opposite the plates 12 held on the hollow cylindrical body 5 in such a way that a narrow space is formed between them and eight capacitors are obtained whose capacity depends on the position plates 32 of the casing 4 with respect to the plates 12 of the housing 3. The sleeve 23 can be made of electrically insulating material having a high mechanical strength. For shielding, the outer surface of the sleeve may be covered with a conductive material. An electrical conductor 33 (FIG. 7) is connected to each of the plates 32. Each conductor 33 exits the casing 4 through a corresponding opening 34 (FIGS. 5 and 7) of the covering element 26 of the casing 4. The casing 4 formed by the sleeve 23 and the closing elements 26 and 27, elastically suspended on the housing 3 (formed A hollow cylindrical body 5 and a connecting element 6) using toroidal rings 15, 17 and 19 Kozh5ps 4 can carry out limited displacements with six degrees of freedom with respect to the body 3. The gaskets 29 and 30 respectively interact with the toroidal rings 19 and 17 to limit the axial movements of the casing 4 with respect to the housing 3. The ends of the fingers 11 and 22, which enter with a gap into the grooves 28 and 31 ° C | accordingly, the angular movements of the housing 4 with respect to the housing 3 are limited. The action of forces or moments applied during operation to the movable lever 2 by means of the sensor 1 is converted into changes in the capacitance of eight capacitors. The recording unit (Fig. 8) is connected to the plates 12 of the housing, and 3 and to the plates 32 of the housing 4 for measuring the capacitance values of each of the capacitors during operation and for providing, on the basis of such a measurement, electrical signals showing the forces and moments applied to the moving part. representing the mobile arm 2 of the robot. Plates 12a, 12%, 120, 12d, l2e, 12f, 12, and 12h are mounted on housing 3, and plates 32a and 32b are mounted on housing 4. Figure 8 introduces the OXYZ orthogonal Cartesian coordinate system, the Z axis of which coincides with the axis of concentric cylindrical surfaces, some of which form plates 12 and 32, the X axis is directed perpendicular to the two corresponding pairs of opposite plates and passes through the center of these plates and the Y axis is directed perpendicular to the Z axis and to the X axis. The 32oi and 32b plates are both grounded. Eight voltage to frequency converters 35-42 are controlled from one common oscillator 43. Each of the voltage-to-frequency converters 35-42 is connected to a capacitor formed by one of the plates 12 and the corresponding plate 32 facing towards it S. The converters 35-42 provide a voltage signal at the output, the amplitude of which is proportional to the capacitance 7 corresponding capacitor to which they are respectively connected. The input voltages of converters 35-42 are denoted V, Vj, respectively. , Vg. Suppose that a force is applied to the casing 4, which is directed in the negative direction along the X axis (Fig. 8). This force causes the casing 4 to move with respect to the inner casing 3 in such a way that the distance between the plates 12a, 12 and 32a decreases, while the distance between the plates 12b 2d and 32a increases. Accordingly, the capacitance of capacitors formed by the plates 12b, 12; and 32a increases, while the capacitance of the capacitors formed by the plates 12a, 12c and 32b decreases. Therefore, the voltages V; j and Vg generated at the outputs of the converters 35 and 39, respectively, increase, and the voltages Vx And Vg, generated respectively at the outputs of the converters 38 and 42, decrease. Therefore, it is clear that the value () (Vg-Vg) shows the relative movement of the casing 4 with respect to the inner case 3 due to the application of a force acting along the X axis. Similarly, it is possible to determine that () + () shows the amount of movement of the casing 4 with respect to the inner case 3 under the action of a force acting along the Y axis. In addition, (Vj-V,) - () () - (Vj-Vg) show the value of the relative rotation of the casing 4 with respect to the inner case 3 under the action of the moments acting respectively around the X axis and around the Y axis, If a certain force is applied to the casing 4, parallel to the Z axis, for example, in the positive direction of this axis, then its action leads to axial movement of the plate 32 0823378 with respect to the eight plates 12. As a result of this movement, the capacitances of the four capacitors formed by the plates 12a, 12b, 12e, 5f12, and portions of the plates 32o and 32b facing towards them increase due to an increase in the overlapping surfaces. On the contrary, the capacitance of the capacitors formed by the plates 12c, 12 (3, 12h and the parts of the plates facing them 32o (and 32b decreases as the overlapping surface area of the plates decreases). 15 On the other hand, if strength, acting on the casing 4, is directed parallel to the Z axis, but in the negative direction, the capacitance of the capacitors containing plates 12c, 20 12cj, 12h, increase, and the capacitors of the capacitors containing plates 12q, 12L, 12 {and 12 decrease. When the direction of the force acting on the casing 4 is parallel to the Z axis, the magnitude (for example) () + () shows the magnitude and direction of the relative displacement between co. housing 4 and the inner casing 3 along Z-axis due to the application of force acting on the casing 4 in parallel The Z axis, and thus, this quantity 5 also shows the magnitude and direction of this force. Obviously, in order to clarify the relationship between capacitance changes. eight capacitors and the magnitude of the O and the direction of the force acting. parallel to the axis Z, it is necessary that the circumference, respectively, limited by the upper edges of the plates 12a, 12b, 12e, 12i and the lower edges of the plates 12c, 12c, 12, 12h lay in their respective planes,. which do not cross the plastic 32a and 32b. If the moment acting around 0 of the Z axis, for example, in the counterclockwise direction, is applied to the casing, then due to the effect of this moment the capacitance of capacitors containing plates 12e, 12f, 12 and 5 12h decreases as a result of decreasing the areas of the parts of the plates 32ci and 32b which overlap these plates. On the contrary, the condenser of sators containing plates | 2a, 12g, 12c and 12g increase due to an increase in their overlap areas with plates 32a and 32b In the case of a moment acting on the case 4 around the Z axis in a clockwise direction, the increase and decrease of the capacitors of the capacitors are inverse to the case described for the moment acting counterclockwise. In each of these cases, the value () + (Vi, -V) shows the magnitude and direction of the relative rotation between the casing 4 and the inner casing 3 due to a moment acting around the casing 4 acting around the Z axis, and therefore this value gives information about both the magnitude and the direction of this moment. Indeed, in order to unambiguously represent the relation between the instantaneous values of capacitors capacitance and the magnitude and direction of forces acting on the casing 4, it is necessary that each of the plates 12 mounted on the inner casing 3 should in no case be overlapped by both plates 32, mounted on the casing 4. Such a situation is prevented by the presence of fingers 11 and 22 (Figures 5 and 6). Due to the fact that these fingers can rotate with limited play in the respective grooves 28a and 31a, they limit the angular movements of the casing 4 with respect to the inner casing 3. Fig. 8 shows the signal processing means 44 generated by the converters 35-42 and showing the components of the forces and moments along the X, Y and Z axes applied to the case 4 and, therefore, transmitted to the arm 2 by the inner case 3. Means of signal processing voltage converters 44 co8233710 For example, differential amplifiers 45-54 and analogue summing circuits 55-58 are held. The connections between the inputs of the differential amplifiers 45-52 and the outputs of the converters 35-42, as well as the connections between these differential amplifiers and the summing circuits 55-58, form a circuit equivalent to six About the relations between the voltages provided at the outputs of the transducers 35-42, and the components along the X, Y, Z axes of the forces and the numbers applied to the casing 4 15 and transmitted to the movable arm 2 by the inner body 3, In particular, at the output terminals of the summing circuit. 55, 56 and 57, there are, when operating, corresponding voltage signals, showing the components along the X, Y, Z axes, respectively, of the forces applied to the casing 4. At the output terminals of the differential amplifiers 53, 54 and summing circuit 58, there are, during operation, corresponding voltage signals showing the components along the axes X, Y and Z, respectively 30 moments applied to the casing 4, The proposed device may comprise a handle for manually controlling the mobile arm 2 of the robot during the training period. In this case The signals provided by the output of the signal processing means 44 can be used by the robot's central processor to minimize the forces and moments applied to 40 handle so that the robot arm passes in space a certain path along which it will subsequently move when the robot itself operates. A working tool can be connected to the lower end of the casing 4 of the device, in which case the device works as a sensitive wrist, capable of determining the stresses that the working tool is subjected to during operation. . .r ™ II / I / I / II FIG. f t 6b 15 15 2: 31F 22 Fig.z Aa 12 13 20 2 28a 2 Fig 5 ZGa 5d 25 0LfZ.6
权利要求:
Claims (2) [1] 1. SENSOR WITH SIX DEGREES OF FREEDOM for converting forces and moments into electrical signals applied to a movable element, comprising a housing, a power-input element, displacement transducers into electrical signals and a recording unit, characterized in that, in order to increase reliability, displacement transducers into electric the signal is placed in a rigid cylindrical casing and is made in the form of eight capacitors, the fixed plates of which are made in the form of two metal semi-cylindrical plates, located equal at equal angles associated with the power-introducing element and located inside the casing mounted on the housing using elastic gaskets made in the form of toroidal rings of elastomeric material, placed in At least one radial protrusion located at the end and lateral surfaces of the housing at the ends of the housing is located in the groove of the housing with the possibility of restricting angular displacements of the housing relative to the housing, and at the ends of the housing are installed annular restrictive pads facing the corresponding mechanical end the surface of the housing and interacting with elastic gaskets with the possibility of limiting axial movements of the casing relative to the housing, and the registration unit is made in the form of a control a generator to which eight voltage to frequency converters are connected, each of which is connected to a corresponding capacitor, and means for processing the signals from the voltage converters. [2] 2. The sensor according to claim 1, characterized in that the end face of the casing, opposite the power-driving element, is provided with means for connecting to the working tool.
类似技术:
公开号 | 公开日 | 专利标题 SU1082337A3|1984-03-23|Six-degree-of-freedom sensor EP0479913B1|1995-02-22|Accelerometer with feedback US4552028A|1985-11-12|Device for measuring force US5764066A|1998-06-09|Object locating system EP0549807B1|1997-10-15|Sensor for force, acceleration and magnetism using piezoelectric devices US3732553A|1973-05-08|Capacitive pick-off transducer US4320392A|1982-03-16|Transducer with six degrees of freedom CN107914265A|2018-04-17|Displacement measuring equipment, robot and robots arm GB2163260A|1986-02-19|Determining the travel of a piston relative to a cylinder CN110462357B|2022-01-25|High reliability torque sensor with moderate flexibility Tsetserukou et al.2006|Optical torque sensors for implementation of local impedance control of the arm of humanoid robot US5708368A|1998-01-13|Method and apparatus for emulation of a linear variable differential transducer by a capacitive gaging system CN107850502B|2020-08-04|Torque sensor WO1992021000A1|1992-11-26|Improvements in or relating to gyroscopic devices CN107314852B|2019-10-11|A kind of wrist sensor US5295399A|1994-03-22|Force moment sensor Das et al.2018|Simple approach to design a capacitive rotary encoder US4799386A|1989-01-24|Electrostatic accelerometer with dual electrical connection to its test mass Wolffenbuttel et al.1990|Compliant capacitive wrist sensor for use in industrial robots SU1210072A1|1986-02-07|Force torque motor RU2140653C1|1999-10-27|Converter of inertial information SU1599644A1|1990-10-15|Differential capacitive transducer of displacements SE518982C2|2002-12-17|Adjustment of an angular position to a robotic arm US4292632A|1981-09-29|Displacement sensing device having capacitance transduction element SU1485135A1|1989-06-07|Angular accelerometer
同族专利:
公开号 | 公开日 IT8067359D0|1980-03-07| US4369663A|1983-01-25| GB2072345A|1981-09-30| DE3107925A1|1982-01-14| GB2072345B|1983-12-07| IT1129409B|1986-06-04| JPS56139891A|1981-10-31| DE3107925C2|1983-07-21| FR2477707A1|1981-09-11| FR2477707B1|1984-02-17|
引用文献:
公开号 | 申请日 | 公开日 | 申请人 | 专利标题 GB731190A|1952-01-17|1955-06-01|Cie Generale Electro Ceramique|Improvements in and relating to electrical devices for measuring forces| US2892152A|1953-09-22|1959-06-23|Buisson Pierre|System for measuring small displacements of a body along three coordinate axes| US3109984A|1958-05-28|1963-11-05|Perkin Elmer Corp|Servomechanism hand control| BE793568A|1971-12-30|1973-04-16|Western Electric Co|METHOD FOR MONITORING THE CAPACITY AND ECCENTRICITY OF A COAXIAL CABLE DURING THE EXTRUSION OF THE INSULATION| GB1368145A|1972-12-04|1974-09-25|Cape Eng Co Ltd|Capacitive transducer| US3921445A|1973-10-15|1975-11-25|Stanford Research Inst|Force and torque sensing method and means for manipulators and the like| FR2267620B1|1974-04-11|1980-05-23|Herve Marcel| DK139644C|1976-12-30|1979-09-03|N Aa J Eilersen| US4132318A|1976-12-30|1979-01-02|International Business Machines Corporation|Asymmetric six-degree-of-freedom force-transducer system for a computer-controlled manipulator system| US4099409A|1977-07-05|1978-07-11|The Bendix Corporation|Multi-axis load cell with arcuate flexures|DE3211992A1|1982-03-31|1983-10-06|Wagner Gmbh J|Method and device for programming a robot, in particular paint spraying robot| GB2123157B|1982-06-22|1986-10-15|Peter Caleb Frederi Wolfendale|Load cells| CH651928A5|1983-02-23|1985-10-15|Christof W Burckhardt|FORCE MEASURING DEVICE.| US4591944A|1984-09-10|1986-05-27|Gmf Robotics Corporation|Electronic circuit for tactile sensors| US5706027A|1985-12-18|1998-01-06|Spacetec Imc Corporation|Force and torque converter for use in a computer input device| DE3606685C2|1986-02-28|1988-11-03|Forschungsinstitut Fuer Steuerungstechnik Der Werkzeugmaschinen Und Fertigungseinrichtungen In Der Institutsgemeinschaft Stuttgart Ev, 7000 Stuttgart, De| EP0584843B1|1990-02-27|1998-10-21|Kabushiki Kaisha Toshiba|Device controlling the machining force of a tool| US5146566A|1991-05-29|1992-09-08|Ibm Corporation|Input/output system for computer user interface using magnetic levitation| US20040160414A1|1996-07-05|2004-08-19|Armstrong Brad A.|Image controller| US6351205B1|1996-07-05|2002-02-26|Brad A. Armstrong|Variable-conductance sensor| US8674932B2|1996-07-05|2014-03-18|Anascape, Ltd.|Image controller| US6222525B1|1992-03-05|2001-04-24|Brad A. Armstrong|Image controllers with sheet connected sensors| US6906700B1|1992-03-05|2005-06-14|Anascape|3D controller with vibration| US5589828A|1992-03-05|1996-12-31|Armstrong; Brad A.|6 Degrees of freedom controller with capability of tactile feedback| US5687080A|1995-06-20|1997-11-11|Ziba Design, Inc.|Multiple axis data input apparatus and method| US6343991B1|1997-10-01|2002-02-05|Brad A. Armstrong|Game control with analog pressure sensor| US6456778B2|1997-10-01|2002-09-24|Brad A. Armstrong|Analog controls housed with electronic displays for video recorders and cameras| US7132642B2|2001-07-09|2006-11-07|Nartron Corporation|Anti-entrapment systems for preventing objects from being entrapped by translating devices| US7293467B2|2001-07-09|2007-11-13|Nartron Corporation|Anti-entrapment system| US6499359B1|2001-07-09|2002-12-31|Nartron Corporation|Compressible capacitance sensor for determining the presence of an object| US20050038563A1|2003-08-16|2005-02-17|Abdul Rauf|Device and method for kinematic calibration of robots| WO2005121812A1|2004-06-09|2005-12-22|ETH Zürich|Multi-axis capacitive transducer and manufacturing method for producing it| US7162928B2|2004-12-06|2007-01-16|Nartron Corporation|Anti-entrapment system| US7312591B2|2005-03-11|2007-12-25|Npc Corporation|Powered panel moving system| US7752920B2|2005-12-30|2010-07-13|Intuitive Surgical Operations, Inc.|Modular force sensor| EP1965717B1|2005-12-30|2012-05-16|Intuitive Surgical Operations, Inc.|Surgical instrument with modular force sensor| US7342373B2|2006-01-04|2008-03-11|Nartron Corporation|Vehicle panel control system| EP2573534A1|2011-09-20|2013-03-27|General Electric Company|Multi degree of freedom transducer| CN105204394B|2015-08-26|2017-08-08|电子科技大学|A kind of six degree of freedom chews the control system of robot| JP6339304B1|2018-02-06|2018-06-06|株式会社トライフォース・マネジメント|Force sensor device|
法律状态:
优先权:
[返回顶部]
申请号 | 申请日 | 专利标题 IT67359/80A|IT1129409B|1980-03-07|1980-03-07|SIX DEGREE TRANSDUCER OF FREEDOM TO CONVERT INTO ELECTRIC SIGNALS THE FORCES AND MOMENTS APPLIED TO A MOBILE BODY PARTICULARLY TO THE MOBILE ARM OF A ROBOT| 相关专利
Sulfonates, polymers, resist compositions and patterning process
Washing machine
Washing machine
Device for fixture finishing and tension adjusting of membrane
Structure for Equipping Band in a Plane Cathode Ray Tube
Process for preparation of 7 alpha-carboxyl 9, 11-epoxy steroids and intermediates useful therein an
国家/地区
|